CVD tube furnace
1.Enclosed tube furnace
2.To be input inert gas, hydrocarbon gas,hydrogen.
3.Max. Temperature 1200C
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!
Technical parameters of CVD tube furnace :
| Model | PT-1200CVD |
| Control system | Intelligent temperature control system |
| Display mode | Digital tube display(LED) |
| Limiting temperature | 1200℃ |
| Working temperature | ≤1150℃ |
| Heating rate | ≤20℃(suggestion:10℃/min) |
| Heating element | Aludirome |
| Heating zone | Single |
| Heating zone length | 400mm |
| Furnace tube material | Quartz tube |
| furnace tube diameter | 80mm |
| The furnace tube length | 1000mm |
| Gas tightness | Vacuum flange and corundum furnace tube up to4.03×10-3Pa |
| Control mode | PID Temperature control |
| Temperature accuracy | ±1℃ |
| Thermal Couple | K Type |
| Working voltage | AC 110-480V 50Hz～60Hz |
| Rated power | 3KW |
| The flow meter | Float flowmeter |
| Pneumatic pressure | -0.1～0.15 MPa |
| Warranty | 12 month (exclusive wearing part) |
After-sales Service
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.