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1400℃ Custom CVD system

1400℃ Custom CVD system

Product Overview:
    This customized CVD system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, and SCR control. The furnace uses aluminum oxide polycrystalline fiber material and the furnace tube Both ends are sealed with stainless steel flanges. The stainless steel flanges are equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.
technical parameter:

product name

Custom CVD system

Product number

PT-CVD-DZ

Vertical tube furnace

Furnace mode

Vertical open type

Furnace material

Imported alumina refractory fiber

Heating element

High quality silicon carbide rod

Limit temperature

1400°C

Operating temperature

≤1300℃

Heating rate

≤20℃ (recommendation: 15℃/min)

Heating temperature zone

Single temperature zone, multiple temperature zone

Total length of temperature zone

200, 300, 440

Furnace tube material

High purity quartz tube, corundum tube

Tube diameter

40, 50, 60, 80, 100mm...

Sealing method

A set of 304 stainless steel vacuum flange (including sealing silicone ring)  

Control mode

Multi-segment intelligent PID program temperature control, reserved communication interface

Temperature control accuracy

±1℃

Temperature curve

Multi-segment "time-temperature curve" can be set arbitrarily

Temperature measuring element

K-type thermocouple

Pneumatic system

Operating Voltage

220V/50HZ

Maximum output power

18W

Operating temperature

5--45℃

Gas channel

Multiple air sources can be connected at the same time

Flowmeter

Mass flowmeter

Range A  

0~500SCCM

Range B 

0~500SCCM

C-channel range  

0~500SCCM

.....

 .....

Air pressure

-0.1~0.15 MPa

Shut-off valve

Stainless steel material

Gas connection pipe

1/4 stainless steel tube

Digital display vacuum gauge and connecting parts

Digital display vacuum gauge  

Digital display vacuum gauge installed on stainless steel flange

      Vacuum pump set (related connection accessories)

Vacuum pump

Vacuum pump and corresponding connecting pipe 220V/50HZ

Certification

ISO certification, CE certification

After-sales service

One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)

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