1200℃ double tube CVD system
Product Overview:
This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially for the research on flexible metal foil electrodes of a new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.
Technical Parameter:
|
product name |
1200℃ double tube CVD system |
|
The first part: 1200℃ double tube CVD system |
|
|
Product number |
PT-1200T |
|
Furnace tube size |
Double quartz tube Outer tube: OD 100 x ID 96 x 1400 mm Inner tube: OD 80 x ID 75 x 1800 mm |
|
Heating zone |
220+220mm |
|
Power supply |
230V, single phase, 50HZ |
|
power |
4.0 kw |
|
Heating element |
Resistance wire |
|
Heating rate |
0-20°C/min |
|
Thermocouple |
Type K |
|
Part 2: Water cooling system |
|
|
Flange |
1. Water chiller CW-3000 2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube. |
|
Part Three Vacuum System |
|
|
Vacuum system |
1. Anticorrosive digital display vacuum gauge 2. VRD-16 rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box |
|
Part Four Air Mixing System |
|
|
Mass flowmeter Range: MFC 1: 0~10 sccm MFC 2: 0~200 sccm MFC 3: 0~10 slm MFC 3: 0~10 slm ....... |
|