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Introduction to the chemical vapor deposition process

Introduction to the chemical vapor deposition process
chemical vapor deposition
Deposition process:
① In the main gas flow area, the mass transfer of reactants from the reactor inlet to the decomposition area
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② Gas phase reaction produces precursors and by-products of film formation;
③ The mass of the film-forming precursor is transported to the growth surface;
④ The film-forming precursor is adsorbed on the growth surface;
⑤ The surface of the film-forming precursor diffuses to the growth point;
⑥ Surface reaction and formation of film growth;
⑦ By-product decomposition of surface reaction products;
⑧ The by-products undergo mass transport from the decomposition zone to the reactor outlet until they are discharged.

The above is a brief introduction to the chemical vapor deposition process

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